半导体和高真空波纹管
semiconductor and ultra vacuum corrugated pipe
•蓄能器 accumulator
•传动器 actuator
•束线管 cable pipe
•腔体升降波纹管 recessed lift corrugated pipe
•连接器 connector
•联轴器（柔性）coupling (flexibility)
•联轴器（扭性）coupling (torsion)
•传送器 conveyer
•导气管 air duct
•闸阀 brake valve
•泄漏检测仪 leak detector
•提升机hoister
•定向器 director finder
•储液槽/容积补偿器 liquid storage tank/volume compensator
•传感器sensor
•缝隙阀 gap valve
•阀杆密封装置 valve rod sealing device
•振动隔离 vibration isolation
•晶圆升降波纹管 wafer lift welded bellows
•晶圆送料器 wafer feeder
•X-Y-Z操纵仪 X-Y-Z controller
特点：
characteristics:
•具有密封防漏功能，确保每秒钟的泄漏量只有1×10-10标准立方厘米的氦气leak proof seal, to guarantee the leak volume of 1х10-10 cm3 helium per second.
•最长的产品生命周期（标准为一百万个周期＋）the longest product life cycle (the standard is one million cycle +)
•能够容忍极端的温度 can tolerate extreme temperature
•低出气率 low gas efficiency
•具有抗腐蚀能力 the capacity of corrosion resistance
设计和制造：
design and manufacture
•BELCAXTM（波纹管设计程序）(design program for corrugated pipe)
•CAD（计算机辅助设计）(computer aided design)
•FEA（有限元分析）(finite element analysis )
•实体建模 solid modeler
•相当大的、可扩展的100、1000和10000级净室clean room of grade 100,1000,and 10000 which are quite big, can be extended
测试范围/可靠性工程：
tested range/reliability engineering
•产品生命周期（以压力和温度为指标）product life cycle (to take pressure and temperature as index)
•-负荷/动力 load / motive power
•质谱仪测试（MST） mass spectrometry tester(MST)
•平均有效面积 mean area of effectiveness
•冶金metallurgy
•压力（爆裂、脉冲）pressure(crack, pulse) •断裂 rupture
•扫描电子显微镜（SEM）scanning electron microscope (SEM)
•冲击impact
•弹簧刚度spring stiffness
•振动（随机、正弦）vibration(random, sine)
•体积变化 volume change
焊接：
welding
•电子束（EBW）（高达150千伏特）electron beam welding(EBW)
•钨极氩弧（GTAW钨极氩弧焊）GTAW
•激光 laser
•微束等离子弧（PAW等离子弧焊）plasma arc welding
•轨道钨极氩弧 rail GTAW
材料：
materials
•300系列不锈钢 300 series of stainless steel
•AM350不锈钢 AM350 stainless steel
•哈氏合金C Ha type alloy C
•Haynes（海恩斯）合金242 Haynes alloy 242
•lnconel（英科耐尔）625和718合金 Inconel 625and 718 alloy
•钛 titanium